Applications
Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
Conductive thin film (Metal, ITO etc)
Diffused sample (or layer)
Silicon-related thin films (LTPS etc), IGZO
Silicon-related epitaxial materials, Ion-implantation sample
Sample sizes
~ 8 inch, ~156x156mm
-Option(Large size stage: Model RG-3000); ~12 inch, ~210x210mm
Measuring range
1. RT-3000/S version;
[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq
2. RT-3000/H version;
［RS] 10mΩ/sq?1GΩ/sq