Fully automatic 4 point probe sheet resistance system for semiconductor process evaluate WS-3000 Napson

Mã sản phẩm: WS-3000 |
Thương hiệu: Napson

Giá bán: Liên hệ
Measurement of resistivity, thickness, conductivity(P/N) and temperature
Tester self-test function, wide measuring range
Thickness, measurement position and temperature correction function for silicon resistivity
Number of cassette station can be changed by customers request
Host (CIM) communication and SMIF or FOUP compatible

Yêu Cầu Giá Tốt

Thông tin sản phẩm
Applications


Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
Conductive thin film (Metal, ITO etc)
Diffused sample (or layer)
Silicon-related epitaxial materials, Ion-implantation sample


Sample sizes


~300mm(and/or Optional 200mm)


Measuring range


[RS] 1m~10M Ω/sq

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