Wafer flatness measurement system FLA-200 Napson

Mã sản phẩm: FLA-200 |
Thương hiệu: Napson

Giá bán: Liên hệ
Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)
Measures all materials including Si, GaAs, Ge, InP, SiC
Full 500 micron thickness measurement range without re-calibration
2-D /3-D Mapping software

Yêu Cầu Giá Tốt

Thông tin sản phẩm
Applications


Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
Silicon-related epitaxial materials, Ion-implantation sample
Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)

Sample sizes


3~8 inch


Measuring range


Thickness: 200 –1200μm
Bow : +/-350μm
Warp: 350μm

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