Applications
Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
Sample sizes
6 ~ 8 inch, or 12 inch
Measuring range
[R] 1m ~ 200Ω・cm
[Thickness] 150 ~ 800μm (300μm between 150～800μm)
* The range is separated from each Low, Middle, High and S-High probe type
*Please refer the measurement range for each probe type as below;
(1) Low ： ０.０１～０.５Ω/□ （０.００１～０.０５Ω‐ｃｍ）
(2) Middle ： ０.５～１０Ω/□ （０.０５～０.５Ω‐ｃｍ）
(3) High ： １０～１０００Ω/□ （０.５～６０Ω‐ｃｍ）
(4) S-High ： １０００～３０００Ω/□ （６０～２００Ω‐ｃｍ）