Applications
Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
Conductive thin film (Metal, ITO etc)
Silicon-related epitaxial materials, Ion-implantation sample
Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
Sample sizes
2 ~ 8 inch, ~156x156mm (Option; ~12 inch, ~210x210mm)
Measuring range
[R] 1m ~ 200 Ω・cm (NC-110PV : 0.2 ~ 20 Ω・cm for solar wafer)
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.
*Please refer the measurement range for each probe type as below;
1 Ｌow ： ０.０１～０.５Ω/□ （０.００１～０.０５Ω‐ｃｍ）
2 Middle ： ０.５～１０Ω/□ （０.０５～０.５Ω‐ｃｍ）
3 High ： １０～１０００Ω/□ （０.５～６０Ω‐ｃｍ）
4 S-High ： １０００～３０００Ω/□ （６０～２００Ω‐ｃｍ）