*Long-term zero stability of <±0.5% full scale per year
*Ultra-fast settling times: 300 ms - <700 ms
*Full-scale flow rates up to 300 slpm
*Ultra-high purity flow path - 4µ inch Ra surface finish
*SEMI F20 compliant wetted materials
*Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
*Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
*MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
*Local display indicates flow, temperature, pressure and
Thông số kỹ thuật
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Differentiator
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*Ultra-High Purity
*Ultra-Fast Response Time
*Pressure Transient Insensitivity
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Performance
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Flow Range (Full Scale Capacity)
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*3 sccm - 300 slm
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Accuracy
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*±1% S.P. > 35-100%
*±0.35% F. S. 2-35%
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Repeatability
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*< ±0.15% S.P.
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Response Time
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*300ms - < 1 sec
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Ratings
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Max Pressure
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*Standard GF Series: 100 psia max
*High Flow GF Series: 75 psig (controller), 150 psig (meter)
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Max Temperature
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*0-5 Vdc
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Electrical
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Analog Communication
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*DeviceNet™
*RS485
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Electrical Connection
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*Analog/RS485 via 9-Pin "D" connector
*DeviceNet™ via 5-Pin "M12" connector
*Various cable adaptors available. See product data sheet for more information.
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Metal Sealed Thermal GF100 Brooks Instruments