*Long-term zero stability of <±0.5% full scale per year
*Settling times: 700 ms - <1 second
*Full-scale flow rates up to 300 slpm
*All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
*Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
*MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
*Local display
*Optional SDS gas delivery
*DeviceNetTM, RS-485 L-Protocol and analog interfaces
Thông số kỹ thuật
Differentiator
*High Purity/Ultra-High Purity
*Standard GF Series
*High Flow GF Series
Performance
*Flow Range (Full Scale Capacity)
- Standard GF Series: 3 sccm - 55 slm
- High Flow GF Series: 55 slm - 300 slm
Accuracy
*±1% S.P. > 35-100%
*±0.35% F.S. 2-35%
Repeatability: < ±0.15% S.P.
Linearity: ±0.5% F.S. (included in accuracy)
Response Time: Normally Open Valve: <1.5 sec (specific models)
Control Range
*Standard GF Series: < 3-100%
*High Flow GF Series: 5-100%
Mechanical
*Wetted Materials
*SEMI F20 HP/UHP Compliant
*316L VIM/VAR
*Hastelloy C-22
*316L Stainless Steel
*304 Stainless Steel
*KM-45
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