*Long-term zero stability of <0.2% full scale per year
*Fast flow response to command changes with negligible overshoot/undershoot
*Wide range of flow ratings - from 3 sccm up to 1000 slpm
*High pressure rating - up to 1,500 psi
*Removable flow sensor
*Insensitive to mounting attitude
*Mechanically and electrically compatible with other mass flow controllers
*Electrically activated valve override
*Corrosion-resistant valve
Thông số kỹ thuật
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Differentiator
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*Proven Reliable Performance
*Long Term Stability
*Easy to Change Range and Recalibrate in the Field
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Performance
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Flow Range (Full Scale Capacity)
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*0 - 1000 slpm
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Accuracy
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*1% of FS
*1.5% of FS > 20 slpm
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Repeatability
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*0.25% of Rate
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Linearity
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*Included in accuracy
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Response Time
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*E Series Controllers: < 3 seconds
*I Series Controllers: < 6 seconds
*Meters: 6 Seconds
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Multi-Gas & Range Configurability
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-
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Max Pressure
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*Controllers: 1500 psig
*Meters: up to 4500 psig on some models
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Control Range
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*50:1
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Zero Stability
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*< 0.2% F.S. per year
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Flow Temperature Coefficient
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*Zero: <0.075% of F.S per oC
*Span: <1.0% of S.P. over 10-50 oC
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Input / Output
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*0-5 Vdc
*I Series: 0-20 mA; 4-20 mA
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Ratings
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Ratings
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Max Temperature
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*65oC
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Mechanical
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Seal Material
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*Elastomer Seal
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Diagnostics
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Diagnostic Capability
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-
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Electrical
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Analog Communication
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*0-5 Vdc
*0-20 mA
*4-20 mA
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*Electrical Connection
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*D-type connector
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Power Supply / Consumption
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*< 10.5 watts
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