*Long-term zero stability of <0.2% full scale per year
*<3 seconds settling time to command changes with negligible overshoot/undershoot
*Wide flow range – from 3 sccm up to 30,000 slpm
*High pressure rating - up to 1,500 psi
*Optional enhanced process internal finish - 5µ inch Ra avg
*Removable flow sensor
*Insensitive to mounting attitude
*Mechanically and electrically compatible with other mass flow controllers
*TTL compatible "valve off" and purge function
Thông số kỹ thuật
*Differentiator: Large installed base with proven long term performance
Performance
*Flow Range (Full Scale Capacity): .06 sccm - 30,000 sccm
*Accuracy
- 1% F.S. incl. linearity
- 1.5% F.S. incl. linearity >20 slpm
*Control Range
- 2-3% - 100%
*Zero Stability: < ±0.5% F.S. per year
Valve Options
*Normally Closed, Normally Open
*Meter (no valve)
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