Pentagon Technologies' QIII Line of Surface Particle Detection (SPD) instrumentation is the industry standard for measuring and controlling surface particle contamination – and it just got better. The new QIII Max SPD includes our newest technology with many enhancements for use in today's critical clean environments.
Reduce seasoning and test wafers
Reduce pump-purge cycles
Increase MTBC by 4x or more
Increase tool availability by 10%+
Predictable, first time tool recovery, every time.
Reduce recovery time by 25-50%
Reduce particle adders by 50%+
Reduce PM cycle time
Reduce troubleshooting events
ISO-14644-9 surface particle compliance