Reduces Overall Costs
• Reduces MFC inventory through its multi-gas/multi-range capability
• Accurate flow control over a wide dynamic range, even when down ranged, reduces need for an additional low range MFC
Easy to Integrate and Operate
• Device configuration and diagnostics made simple through standard Ethernet interface
• Uses a standard web browser with no special software required
• CE Mark and RoHS Compliance - meeting requirements for the European Union
Improved Performance
• IP66 rated enclosure provides protection against ingress of water and dust present in harsh environments
• Fast response to set point change reduces flow stabilization time for short process steps, enhancing process throughput
• Tightly controlled flow accuracy of process gas enables improved process matching
• Reduced inlet pressure (pressure drop)
requirement simplifies gas supply regulation from a single source
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