Easy to Integrate and Operate
•Device configuration and diagnostics made simple through standard Ethernet interface
•Uses a standard web browser with no special software required
•Easy viewing of flow rate, gas type and Full Scale flow with its bright LED display
Improved Performance
•Fast response to set point reduces flow stabilization time for short process steps enhancing process throughput
•Tightly controlled flow accuracy of process gas enables improved chamber process matching
• Reduced inlet pressure (pressure drop) requirement which can simplify gas supply regulation from a single source
Reduces Overall Costs
• Reduces MFC inventory through its multi-gas/multi-range capability
• Accurate flow control over a wide dynamic range, even when down ranged, reduces need for an additional low
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