Superior Performance
• Fast response to set point reduces flow stabilization time for short process steps and process control
• Tightly controlled flow accuracy of process gas enables improved chamber process matching
Reduces Overall Costs
• Reduces MFC inventory through its multi- gas/multi-range capability
• Accurate flow control over a wide dynamic range, even when down ranged, reduces need for an additional low range MFC
Thông số kỹ thuật
