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Stroke (X x Y x Z)
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Standard- 300 x 300 x 150mm (11.8 x 11.8 x 5.9 in); with High Magnification module VMR-z120x 300 x 300 x 150mm (11.8 x 11.8 x 5.9 in)
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Measuring accuracy
(X . Y)
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Standard U1XY - ; High Magnification U2XY (0.9 + L/300) microns; U1XY (0.6 + L/300) µm
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Maximum specimen height
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Standard 150; High Magnification 150
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Z-axis guide accuracy
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(0.9 + L/150) µm
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Dimensions (W x D x H) and weight (Main Body)
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(including table) 1000 x 1230 x 1900 mm (39.4 x 48.4 x 74.8 in); 600kg (1322.8 lb)
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Auto focus
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(Standard model/High magnification model) Image AF, Laser AF
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Field of view
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(Standard) 10 x 8 to 1 x 0.8mm; (High magnification model 1) 4 x 3.2 to 0.4 x 0.32mm; (High magnification model 2) 2 x 1.6 to 0.2 x 0.16mm; (High magnification model 3) 1 x 0.8 to 0.1 x 0.08mm
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Minimum readout
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0.01 µm
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Footprint (D x W)
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1500 x 2000 mm (59.1 x 78.7 in)
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Maximum workpiece weight
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10kg (22.0 lb)
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Dimensions (W x D x H) and weight (Illuminator)
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220 x 130 x 360mm (8.7 x 5.1 x 14.2 in); 7kg (15.4 lb)
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Zoom Magnification
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5-step zoom for all models- (Standard) 0.75x to 7.5x; (High magnification model 1) 1.875x to 18.75x; (High magnification 2) 3.75x to 37.5x; (High magnification 3) 7.5x to 75x
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Power source
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AC 100 to 240 V ±10%, 50/60 Hz
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Power consumption
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Approximately 15A
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Camera
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B/W CCD or color CCD camera
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Host Computer
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Main unit PC compatible
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