| Stroke (X x Y x Z): | Standard 1000 x 800 x 150mm (39.4 x 31.5 x 5.9 in); High Magnification 1000 x 800 x 115mm (39.4 x 31.5 x 4.5 in) | 
        
            | Z-axis guide accuracy: | (3 + L/50) µm | 
        
            | Host Computer: | Main unit IBM PC/AT compatible (Windows® 2000); CRT 21-inch color | 
        
            | Maximum specimen height : | Standard 135mm, High Magnification 110mm | 
        
            | Auto focus: | (Standard model/High magnification model I) Image AF, Laser AF; (High magnification model II) Image AF, TTL Laser AF | 
        
            | Measuring accuracy (X . Y): | Standard U1XY- (3.5 + L/200) µm; High Magnification U2XY- (3.5 + L/250) µm, High Magnification U1XY- (2.5 + L/250) ) µm | 
        
            | Field of view: | (Standard) 10 x 8 to 1 x 0.8mm, (High magnification model I) 4 x 3.2 to 0.4 x 0.32mm, (High magnification model II) 2 x 1.6 to 0.2 x 0.16mm, (High magnification model III) 1 x 0.8 to 0.1 x 0.08mm | 
        
            | Minimum readout: | 0.1 µm | 
        
            | Dimensions (W x D x H) and weight (Main Body): | 1534 x 2117 x 1793mm; 1500kg (60.4 x 83.3 x 70.6 in; 3,306.9 lb) | 
        
            | Footpring (D x W): | 2600 x 2300mm (102.4 x 90.6 in) | 
        
            | Dimensions (W x D x H) and weight (Illuminator): | 220 x 130 x 360mm; 7 kg (8.7 x 5.1 x 14.2 in (15.4 lb) | 
        
            | Maximum workpiece weight: | 40kg (88.2 lb) | 
        
            | Zoom Magnification: | 5-step zoom for all models: (Standard) 0.75x to 7.5x, (High magnification model I) 1.875x t 18.75x, (High magnification II) 3.75x to 37.5x, (High magnification III) 7.5x to 75x | 
        
            | Power source: | AC 100 to V ±10%, 50/60 Hz | 
        
            | Power consumption: | Approx 18A | 
        
            | Camera: | B/W CCD or color CCD camera |