Advanced software
A wealth of Microsoft Windows®-based advanced applications systems are available, including:
- Trace Element Analysis Program for simpler, optimized analysis of trace elements including adding data collected from up to 5 spectrometers
- Phase Map Maker for automatic creation of phase maps based on principal components
- Non-Flat Surface Analysis Program for automated WDS analysis of specimens with surface irregularities.
Flexible WDS-spectrometer configuration
Various X-ray spectrometers (WDSs) can be selected (2 crystal or 4 crystal spectrometer, spectrometer optimized for trace elements or high count rates). Also a huge variety of different Analyzer crystals is available. Users can select from these spectrometers depending on requirements.
Combined WDS/EDS system
The JXA-8530F Plus comes with JEOL’s 30 mm2 silicon-drift detector (SDD). A high count-rate SDD along with an in-situ variable aperture enables EDS analyses at WDS conditions. EDS spectra, maps and line scans can be acquired simultaneously with WDS data.
Thông số kỹ thuật
| Electron optics |
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Elemental analysis range
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WDS: (Be) B to U, EDS: B to U
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X-ray spectrometry range
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WDS spectrometry range: 0.087 to 9.3 nm
EDS energy range: 20 keV
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Number of X-ray spectrometers
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WDS: 1 to 5 selectable, EDS: 1
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Maximum specimen size
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100 mm × 100 mm × 50 mm (H)
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Accelerating voltage
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1 to 30 kV (0.1 kV step)
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Probe current stability
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± 0.3%/h
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Secondary electron image resolution
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3 nm at WD 11 mm, 30 kV
20 nm at 10 kV, 10 nA, WD 11 mm
50 nm at 10 kV, 100 nA, WD 11 mm
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Magnification
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ｘ40 to ｘ300,000 (WD 11mm)
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Scanning image pixel resolution
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Up to 5,120 ｘ 3,840
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