Characteristic:
High Accuracy Measurement I The
rotary phase method is adopted as the measurement method, and highly accurate measurement is realized in any region independently of the measured value Δ (phase difference) value .
High Accuracy Measurement II The
phase plate uses a dedicated broadband phase plate, and high reproducibility can be measured by the rotation of the optical element by our proprietary Hall motor.
Thông số kỹ thuật
specification |
Specifications |
Measurement method
|
Rotating retardation method (RQ method) |
Method |
Rotating Retarder Method |
light source
|
150 W Ha lamp |
Light
Source |
150 W Halogen |
Beam diameter |
Approx. Φ 1 ~ 5 mm |
Beam Dia |
Approx. Φ 1 ~ 5 mm |
Angle of incidence |
Automatic variable, manual variable or fixed (optional)
Automatic 45 ° to 90 °
0.01 ° increments |
Incident
Angle |
Auto, Manual or Fixed
Auto (45 ° to 90 °
0.01 ° step)
|
Sample
Stage |
6 inch size standard (8 ", 12")
automatic θ - Y type
manual θ - Y type
motor drive Z axis
manual Z axis
manual tilt mechanism attached |
Sample
Stage |
6 "standard (8" & 12 "optional)
Auto θ - Y Manual
θ - Y
Motor - driven Z - axis
Manual Z - axis
Manual tilt control |
Measurement accuracy |
Δ = ± 0.05 °
ψ = ± 0.05 °
@ SiO 2 (1000 Å) / Si |
Accuracy |
Δ = ± 0.05 °
ψ = ± 0.05 °
@ SiO 2 (1000 Å) / Si |
Wavelength region |
360 to 900 nm |
Wavelength
Range |
360 to 900 nm |
Wavelength resolution |
1.5 nm |
Wavelength
Resolution |
1.5 nm |
PC |
IBM-PC or compatible machine |
PC |
IBM-PC compatible |
Size |
300 W × 400 D × 450 H mm |
Dimensions |
300 W × 400 D × 450 H mm |
>>> Phase difference measurement device LD giá rẻ