Ellipsometer MASS-105 Five Lab

Mã sản phẩm: MASS-105 |
Thương hiệu: Five Lab

Giá bán: Liên hệ
Ellipsometer
Model: MASS-105
Hãng: Five Lab


Yêu Cầu Giá Tốt

Thông tin sản phẩm
Characteristic:
High Accuracy Measurement I The
rotary phase method is adopted as the measurement method, and highly accurate measurement is realized in any region independently of the measured value Δ (phase difference) value .
 
High Accuracy Measurement II The
phase plate uses a dedicated broadband phase plate, and high reproducibility can be measured by the rotation of the optical element by our proprietary Hall motor.


Thông số kỹ thuật



specification Specifications

Measurement method

Rotating retardation method (RQ method) Method Rotating Retarder Method

light source

150 W Ha lamp Light 
Source
150 W Halogen
Beam diameter Approx. Φ 1 ~ 5 mm Beam Dia Approx. Φ 1 ~ 5 mm
Angle of incidence Automatic variable, manual variable or fixed (optional) 
Automatic 45 ° to 90 ° 
0.01 ° increments
Incident 
Angle

Auto, Manual or Fixed 
Auto (45 ° to 90 °

0.01 ° step)

Sample 
Stage
6 inch size standard (8 ", 12") 
automatic θ - Y type 
manual θ - Y type 
motor drive Z axis 
manual Z axis 
manual tilt mechanism attached
Sample 
Stage
6 "standard (8" & 12 "optional) 
Auto θ - Y  Manual 
θ - Y 
Motor - driven Z - axis 
Manual Z - axis 
Manual tilt control
Measurement accuracy Δ = ± 0.05 ° 
ψ = ± 0.05 ° 
@ SiO 2 (1000 Å) / Si
Accuracy Δ = ± 0.05 ° 
ψ = ± 0.05 ° 
@ SiO 2 (1000 Å) / Si
Wavelength region 360 to 900 nm Wavelength 
Range
360 to 900 nm
Wavelength resolution 1.5 nm Wavelength 
Resolution
1.5 nm
PC IBM-PC or compatible machine PC IBM-PC compatible
Size 300 W × 400 D × 450 H mm Dimensions 300 W × 400 D × 450 H mm



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