| specification |
Specifications |
|
Measurement method
|
Rotating retardation method (RQ method) |
Method |
Rotating Retarder Method |
|
light source
|
0.8 mW HeNe laser (λ@632.8 nm) |
Light
Source |
0.8 mW HeNeLaser (λ@632.8 nm) |
| Beam diameter |
0.8 mmφ |
Beam Dia |
0.8 mmφ |
| Angle of incidence |
Automatic variable, manual variable or fixed (optional)
Automatic 45 ° to 90 °
0.01 ° increments |
Incident
Angle |
Auto, Manual or Fixed
Auto (45 ° to 90 °
0.01 ° step)
|
Sample
Stage |
6 inch size standard (8 ", 12")
automatic θ - Y type
manual θ - Y type
motor drive Z axis
manual Z axis
manual tilt mechanism attached |
Sample
Stage |
6 "standard (8" & 12 "optional)
Auto θ - Y Manual
θ - Y
Motor - driven Z - axis
Manual Z - axis
Manual tilt control |
| Measurement accuracy |
Δ = ± 0.01 °
ψ = ± 0.01 °
@ SiO 2 (1000 Å) / Si |
Accuracy |
Δ = ± 0.01 °
ψ = ± 0.01 °
@ SiO 2 (1000 Å) / Si |
| Measurement time |
Min 0.05 sec |
Sample
Time |
0.05 sec minimum |
Soft
ware |
Select for research / industrial use |
Software |
Choice of Research
Industrial Control |
| PC |
IBM-PC or compatible machine |
PC |
IBM-PC compatible |
| Size |
300 W × 400 D × 450 H mm |
Dimensions |
300 W × 400 D × 450 H mm |