40 Micron XY Scanner
Type |
Modified Tripod |
xy Linearity |
< 1% |
xy Range |
> 40 μm |
xy Resolution |
< 3 nm closed loop
< 0.3 nm open loop |
xy Actuator type |
Piezo |
xy Sensor type |
Strain Gauge |
16 Micron Z Scanner / Probe Holder
Includes both Air, and Dunk And Scan
Noise |
< 0.2 nm |
Strain Gauge Resolution |
1 nm |
Tip Angle |
10 ° |
Z Linearity |
< 5% |
Z Linearity-Sensor |
< 1% |
Light Lever AFM Force Sensor
Probe Types |
Industry-Standard |
Probe Insertion |
Manual |
Probe Exchange |
Tool |
Probe Holding Mechanism |
Clip
Vibrating Mode Piezo
Electrical Connector to Probe |
Laser/Detector Adjustment Range |
+/- 1.5 mm |
Adjustment Resolution |
1 µm |
Minimum Probe to Objective |
25 mm |
Laser Type |
670 nm Diode, < 3 mW |
Laser Focus |
< 25 μm |
Probe sample angle |
10° |
Detector
Type |
4 Quadrant |
Band Width |
> 500 kHz |
Signals Transmitted |
TL, BL, TR, BR |
Gain |
Low, High Settings |
Digital Data Input Output
Scanning DAC
Number |
2 |
Bits |
24 |
Frequency |
7 kHz |
Control DAC
Number |
2 |
Bits |
14 |
Frequency |
2 kHz |
ADC
Number |
8 |
Bits |
14 |
Frequency |
48 kHz |
|
|
Z Motion
Type |
Direct Drive |
Range |
25 mm |
Drive Type |
Stepper Motor |
Min. Step Size |
330 nm |
Slew Rate |
8 mm/minute |
Limit Switch |
Top, Bottom |
Control |
Software – Rate, Step Size |
Analog Electronics
» Vibrating Mode
Freq Range |
2 kHz – 800 kHz |
Output Voltage |
10 Vpp |
Demod. Freq |
TBD |
» Z Feedback
Type |
PID |
Bandwidth |
> 3 kHz |
Sample Hold |
Yes |
Voltage |
0-150 V |
» XY Scan
Voltage |
0 – 150 V |
Bandwidth |
> 200 Hz |
Pan & Zoom |
22 Bits |
» Tip Approach Cutoff |
< 20 μm sec. |
Software
Environment |
LabVIEW |
Operating System |
Windows |
Image Acquisition |
Real Time Display
(2 of 8 channels) |
Control Parameters
PID |
Yes |
Setpoint |
Yes |
Range |
Yes |
Scan Rate |
Yes |
Image Rotate |
0 and 90° |
Laser Align |
Yes |
Vibrating Freq. Display |
Yes |
Force Distance |
Yes |
Tip Approach |
Yes |
Oscilloscope |
Yes |
Image Store Format |
Industry Standard |
Image Pixels |
16 x 16 to 1024 x 1024 |
H.V. Gain Control |
XY and Z |
Real Time Display |
Line Level, Light Shaded,
Grey Color Palette |
Calibration |
System Window |
Probe Center |
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