Trace moisture for sub-atmospheric pressure HALO RP H2O Tiger Optics

Mã sản phẩm: HALO RP H2O |
Thương hiệu: Tiger Optics

Giá bán: Liên hệ
It’s one thing to monitor and have high confidence in your high purity bulk and specialty gases at the post-purifier stage, but a lot can change as that same gas then travels through the various fab distribution systems and arrives at the equipment or process chamber.

Yêu Cầu Giá Tốt

Thông tin sản phẩm
Applications


Gas Quality Control
High-Brightness LEDs
Research & Development
Semiconductor Process Tools

Performance
Operating range See Detection Capability table
Detection limit (LDL, 24 h peak-to-peak) See Detection Capability table
Sensitivity (3σ) See Detection Capability table
Precision (1σ, greater of) ± 1% or 1/3 of Sensitivity
Accuracy (greater of) ± 4% or 1/2 of LDL
Speed of response < 3 minutes to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions*
Wetted materials 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4" male VCR inlet & outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 50 torr – 15 psig (0.07 – 2 bara)
Outlet pressure <10 Torr (13 mbar)
Flow rate Up to 1.0 slpm
Sample gases H2, N2, Ar, HCl, and others
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 30 lbs (13.4 kg)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet, RS-232
  802.11g Wireless (optional), Modbus TCP (optional)


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