- Light interference thickness monitor for thickness and optical constant analysis of multi layers using reflection spectrum between UV to NIR light.
- Adoption of spectroscopy enables non-contact, non-destructive, highly precise, highly reproducible thickness measurement
- Wide wavelength range(190nm - 1600nm)
- Wide film thickness range （1nm～1mm)
- Microscopic function (Min φ3μm) enables measurement of patterned sample and rough surface sample