SE500BA is most advanced model among SE series. It covers DUV to NIR range (250 to 1700nm) with automatic goniometer for incident angle changes from 20 to 90 degree at 0.01 degree resolution. Array based detecting setup gives user a fast measurement, just in seconds. When a mapping or real time in situ measurement is needed, this is the best choice among all SE models. Wavelength range can be further extended down to 190nm if requested, as an option for some applications in semiconductor fields.. In this system, a combined DUV and Vis-NIR light source is used so user can use both or either one of them. In the product photo, a 100mmx100mm motorized mapping stage is equipped, plus also a rotary table and a motorized Z stage. There are several other options available. Please fell free to contact us for any special needs. It's our goal to provide a tool, whatever it is standard configuration or it is customized, to meet your application needs.
Capable to be used for real time or in-line thickness, refractive index monitoring
System comes with comprehensive optical constants database and library
Advanced TFProbe 3.3.X Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
Three different user level control: Engineer mode, system service mode and easy user mode
Flexible engineer mode for various recipe setup and optical model testing
Robust one click button (Turn-key) solution for quick and routine measurement
Easy to operate with Window based software
Advanced optics design for best system performance
High Power DUV-VIS-NIR light source for broad band applications
Array based detector system to ensure fast measurement
Measure film thickness and Refractive Index up to 12 layers
Configurable measurement parameters, user preference and easiness of operation
Fully automatic calibration and initialization for system
Precise sample alignment interface from sample signal directly, no external optics needed
Precise height and tilting adjustment
Apply to many different type of substrates with different thickness
Various options, accessories available for special configurations such as mapping stage, wavelength extension, focus spot etc.
2D and 3D output graphics and user friendly data management interface