Benefits:
Higher deposition and yield rates
Superior film uniformity and quality
Reduced substrate damage caused by arcing
Lower cost
Easy system integration
Excellent process flexibility and latitude
Repeatable performance
Stable operation high on the transition curve
Higher throughput
Convenient monitoring and control
Unmatched system flexibility
Features:
One compact package
Adjustable frequency range of 5 to 350 kHz
Variable duty cycle up to 45%
Wide voltage range—single-tap wide impedance range
High-power operation
Low substrate heating
Superior arc control
Dual output for multi-chamber production