An optical profilometer is now half the price of a basic stylus profilometer! The Profilm3D uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05 µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001 µm.
Mechanical Specifications
| Z Range |
100 mm |
| Piezo Range |
500 μm |
| XY Stage Type |
Automated |
| XY Stage Range |
100 mm x 100 mm |
| Camera |
2592 x 1944 (5 megapixels) |
| System Size, W x D x H |
300 mm x 300 mm x 550 mm |
| System Weight |
15 kg |
| Thickness Range, WLI |
50 nm - 10 mm |
| Thickness Range, PSI1 |
0 - 3 μm |
| Sample Reflectance Range |
0.05% - 100% |