Monitor for Airborne Molecular Contaminants (AMCs) Tiger-i 2000 HF Tiger Optics

Mã sản phẩm: Tiger-i 2000 HF |
Thương hiệu: Tiger Optics

Giá bán: Liên hệ
State-of-the-art trace gas analyzer for detection & continuous monitoring of hydrogen fluoride (HF) Airborne Molecular Contaminants (AMCs) in semiconductor cleanrooms

Yêu Cầu Giá Tốt

Thông tin sản phẩm
Applications


Air Quality
Airborne Molecular Contaminants
HF Alkylation Unit Emissions
Research & Development

Performance
Operation range See Detection Capability table
Detection limit (LDL, 3σ or 24 h peak-to-peak) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or the LDL
Zero drift None
Speed of response 2 minutes to 80%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials Sample gas compatible
Gas connections 1/4" male VCR inlet & outlet
Leak tested to 1 x 10-9 mbar l /sec
Inlet pressure 0 – 15 psig (1 – 2 bara)
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼1 slpm
Sample gases Ambient air, clean dry air (CDA), or N2
Gas temperature Up to 60°C
Dimensions
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 33 lbs (15 kg)
AMC cart (excl. sensors and pumps) 260 lbs (118 kg)
Electrical 0-5 VDC, isolated 4-20mA or 0-20 mA output
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet, RS-232
  802.11g Wireless (optional), Modbus TCP (optional)
Patents 0.2 ppb


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