Measuring principle
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Stylus method
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Probe
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BFW skidless system with MarSurf SD 26 drive unit and/or PHT skidded system with MarSurf RD 18 drive unit
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Measuring range mm
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+/- 250 µm (up to +/- 750 µm with 3x probe arm length) applies to BFW system
350 µm applies to PHT probe system
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Filter according to ISO/JIS
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Filter as per ISO 16610-21 (formerly ISO 11562), robust Gaussian filter as per ISO 16610-31, filter as per ISO 13565
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Traversing lengths
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MarSurf GD 26 / SD 26: Automatic; 0.56 mm*; 1.75 mm; 5.6 mm; 17.5 mm, 56 mm,
Measurement up to stop, variable
* Traversing length dependent on drive unit
RD 18: Automatic; 1.75 mm; 5.6 mm; 17.5 mm
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Number n of sampling length according to ISO/JIS
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1 to 50 (default: 5)
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Measuring force (N)
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0,7 mN
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Surface parameters
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Over 80 surface parameters for R-, P- and W-profiles
according to current ISO/JIS or MOTIF standards (ISO 12085)
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