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Resolution
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In Z, relative to stylus tip:
0.38 µm (350 mm probe arm) / 0.19 µm (175 mm probe arm)
In Z, relative to measuring system:
0.04 µm
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Sampling angle
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on smooth surfaces, depending on deflection:
trailing edges up to 88°, leading edges up to 77°
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Start of traversing length (in X)
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0.2 mm
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Tip radius
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25
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Contacting speed (in Z)
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0.1 to 1 mm/s
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Probe arm length
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175 mm, 350 mm
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End of traversing length (in X)
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200 mm
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Positioning speed
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In X and return speed: 0.2 to 8 mm/s
In Z: 0.2 to 10 mm/s
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Guide deviation
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< 1 µm (over 200 mm)
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Measuring speed
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0.2 mm/s to 4 mm/s
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Measuring principle
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Stylus method
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Probe
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R probe, MFW 250
Optical probe Focodyn*, LS 1*, LS 10*
(*only in conjunction with PGK or GD 120 CNC drive unit)
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Measuring range mm
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(in Z) 50 mm
MFW 250: ±25 µm, ±250 µm, (up to ±750 µm); ±1000 µin, ±10,000 µin (up to ±30,000 µin)
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Traversing lengths
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Automatic; 0.56 mm; 1.75 mm; 5.6 mm; 17.5 mm, 56 mm,
(.022 / .070 / .224 / .700 / 2.240 in),
Measurement up to stop, variable
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Number n of sampling length according to ISO/JIS
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1 to 50 (default: 5)
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Measuring force (N)
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1 mN to 120 mN, below and above
(can be set in MarSurf XC 20)
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