Benefits:
Reduced charge damage to fragile device structures, enabling higher yields
Generates high reactive specie fluxes, delivering higher process rates
Broadens the range of process chemistries, enabling a wide
range of applications
Provides fast matching, stable power delivery for precise
process control
Comprises one small-footprint package, providing reduced CoO
Features:
Delivers reactive gas species to the process chamber
Provides the highest available plasma power density
Uses durable SiO2 or Al2O3 chamber materials
Uses patented LitmasMatch™ solid-state power-delivery topology
Integrates the power supply, match, and plasma chamber in one package