HIGHLIGHTS MICROPROF® MHU
Material Handling Unit with twin-arm robot
High throughput, up to 200 w/h
Loading station for open cassettes
OCR reader / Pre-aligner
Sorting function for the separation of good and bad samples
Optional SECS/GEM interface
Many industrial applications require fully-automated measurements with high throughput. This, in turn, requires automatic handling of the samples. The optional MHU for the MicroProf® series has been specially designed for the semi-conductor, MEMS and LED industry and can be easily configured for various sample (wafer) types. The handling unit can handle wafer sizes between 2 and 12 inches. Depending on the configuration, up to four cassettes can be processed simultaneously.