| DCM-60 |
DCM-40 |
Objectives
(To be selected
by customer) |
| (Total Magnification) |
(50X) |
(100X) |
(200X) |
(400X) |
| Top |
PLM5X |
PLM10X |
PLLWDM20X |
PLLWDM40X |
| Bottom |
PLM5X |
PLM10X |
PLLWDM20X |
PLLWDM40X |
|
| Eyepiece |
A pair of SUW10X
(including Micrometer Reticle) |
A pair of UW10X
(including Micrometer Reticle) |
| Total Magnification |
50X to 400X (Larger Magnifications are available on custom-order basis.) |
| Travel Distance of Upper Objective |
24mm |
30mm |
| Travel Distance of Lower Objective |
3mm |
12mm |
| Filter |
Top:Green / Bottom:Red |
| Stage & Counter |
150 x 150mm Manual Stage
KC-12R Counter (1μm reading) |
50 x 50mm Manual Stage, Digital Micrometer (1μm reading) 100 x 100mm Manual Stage, KC-12R Counter (1μm reading) |
| Stage Travel |
X : 150mm Y : 150mm |
X : 50mm Y : 50mm
X : 100mm Y : 100mm |
| Wafer Holder |
Maximum : 6 inches |
Maximum : 4 inches |
| Holder can be supplied in specially designed shape on custom-order basis. |
| Stage Rotation |
360° |
| Illumination |
150W Halogen Light Guide Illumination |
| Thickness of Material |
20mm or less |
30mm or less |
| Type of Calibration Chart |
Calibration Chart for Optical Axis Alignment |