Bronkhorst® model F-200CI Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 0,014…0,7 mln/min and 0,6…9 mln/min with pressure rating between vacuum and 64 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The IN-FLOW model is of rugged design (IP65) for use in industrial environments or even Zone 2 hazardous areas, with optional ATEX Cat. 3 approval.
IN-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, or FLOW-BUS protocols.
Lowest gas flow rates
Compact design, small internal volume
High accuracy and repeatability
Virtually pressure and temperature independent
Rugged, weatherproof housing (IP65, dust and waterproof)
Thông số kỹ thuật
| Measurement / control system |
Accuracy (incl. linearity)
(based on actual calibration) |
±0,8% Rd plus ±0,2% FS for F-200CI-005;
±2% FS for F-200CI-002 |
| Turndown |
1:50 (in digital mode up to 1:187,5) |
| Multiple fluid capability |
storage of max. 8 calibration curves |
| Repeatability |
< 0,2% Rd |
| Settling time (controller) |
2…4 seconds |
| Control stability |
< ±0,1% FS |
| Max. Kv-value |
6,6 x 10-2 |
| Operating temperature |
-10…+70°C;
for ATEX cat. 3 0…50°C
|
| Temperature sensitivity |
zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
| Pressure sensitivity |
0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
| Leak integrity, outboard |
tested < 2 x 10-9 mbar l/s He |
| Attitude sensitivity |
max. error at 90° off horizontal 0,2% at 1 bar, typical N2 |
| Warm-up time |
30 min. for optimum accuracy
2 min for accuracy ± 2% FS |