Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4" face seal male (VCR) connections.
Lowest range 0,12...6 mln/min
Highest range 1... 50 ln/min
Metal Sealed Mass Flow Meter/Controller with fieldbus interface
Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW®design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software.
Resealable metal-to-metal outer seal construction (no rings)
Electropolished wetted parts
Cleanroom assembled
Analog and digital I/O, with optionally integrated interface to
DeviceNet™, PROFIBUS DP, PROFINET, Modbus-ASCII/RTU, EtherCAT® or FLOW-BUS
High accuracy and repeatability
Stable control, even at varying process volumes
| Measurement / control system |
|
Accuracy (incl. linearity)
(based on actual calibration)
|
±0,8% Rd plus ±0,2% FS for F-110CI-005;
±2% FS for F-110CI-002 |
| Turndown |
1:50 (in digital mode up to 1:187,5) |
| Multi fluid capability |
storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar abs
|
| Repeatability |
< 0,2% Rd |
|
Response time
|
FS < 3 mln/min: 2 sec;
FS > 3 mln/min: 1…2 sec |
| Operating temperature |
-10…+70°C;
for ATEX cat. 3 0…50°C |
| Temperature sensitivity |
zero: < 0,05% FS/°C; span: < 0,05% Rd/°C |
| Pressure sensitivity |
0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 |
| Leak integrity, outboard |
tested < 2 x 10-9 mbar l/s He |
| Attitude sensitivity |
max. error at 90° off horizontal 0,2% FS at 1 bar, typical N2 |
| Warm-up time |
30 min. for optimum accuracy
2 min for accuracy ± 2% FS |