HFV® Variable Frequency (~2 MHz) Generators Advanced energy

Mã sản phẩm: |
Thương hiệu: Advanced energy

Giá bán: Liên hệ
Used primarily as a plasma generator for 200 and 300 mm wafer processing, flat panel display (FPD), and DVD equipment, the flexible HFV® generator offers process consistency for ionized physical vapor deposition (IPVD), CVD, and etch. This versatile power generator’s features include digitally synthesized variable-frequency output and microprocessor control, with output power levels of 5 and 8 kW.

Yêu Cầu Giá Tốt

Thông tin sản phẩm

Benefits:

Improves run-to-run accuracy 
Delivers versatility 
Increases reliability 
Enhances process flexibility 
Reduces CoO

Features:

Customizable frequency tuning parameters 
Output frequency range of 1.765 to 2.165 MHz 
5 and 8 kW output power levels 
Digitally synthesized frequency output 
Microprocessor control


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