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Mass flow controller (Model : MPC)


Appearance Major applications Pipe size
(B)
Flow rate
range
Replacement of float type flowmeter (purgemeter)
Auxiliary devices
1/8 0.5 L/min to
20 L/min
Gas Types Air N2 O2 Ar CO2 City gas Methane Propane Butane H2 He N2O
               





Compact Digital Mass Flow Controller (Model : F4H)


Appearance Major applications Pipe size
(B)
Flow rate
range
Equipment for vacuum deposition and for electronic component firing and analysis 1/4 50 mL/min to
20 L/min
Gas Types Air N2 O2 Ar CO2 City gas Methane Propane Butane H2 He N2O
         





Digital mass flow controller (Model : MQV)


Appearance Major applications Pipe size
(B)
Flow rate
range
Tooling burner air-fuel ratio control, and fuel battery
evaluation equipment
1/4
1/2
0.2 L/min
to
1000 L/min
Gas Types Air N2 O2 Ar CO2 City gas Methane Propane Butane H2 He N2O
 


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