|
Resolution
|
In Z, relative to stylus tip: 0.38 µm (350 mm probe arm) / 0.19 µm (175 mm probe arm)
In Z, relative to measuring system: 0.04 µm
|
In Z, relative to stylus tip: 0.38 µm (350 mm probe arm) / 0.19 µm (175 mm probe arm)
In Z, relative to measuring system: 0.04 µm
|
|
Sampling angle
|
On smooth surfaces, depending on deflection: trailing edges up to 88°, leading edges up to 77°
|
On smooth surfaces, depending on deflection: trailing edges up to 88°, leading edges up to 77°
|