Benefits:
Increased film value: repeatable, customizable deposited films
Lower cost of ownership and increased productivity
Lower upfront costs
Higher power levels with reduced arc damage
Easy scalability, integration, and support
Features:
Modular and scalable (30, 40, and 60 kW units configurable up to 180 kW)
Selectable frequency (500 Hz to 50 kHz)
Power, current, or voltage regulation
Adjustable duty cycle—independent power ratio regulation for each magnetron
Unipolar and bipolar operation
Lowest arc energy possible from any industrial dual-magnetron sputtering supply
CEX (phase synchronization)
EU RoHS compliant