Ascent® AMS DC Power Supplies—30, 40, and 60 kW Advanced energy

Industry-leading arc management—stable power delivery through extreme arc conditions, for highly repeatable films. As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability.

High film quality and throughput
Reduced film, substrate, and equipment damage
Stable throughput and power delivery under extreme arcing conditions
Easy integration and control

Features:

Arc Management System™ (AMS) technology—customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc Sync® technology—master/slave up to 12 units
Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, and analog communications
Virtual Front Panel (VFP) software, remote control panel, and passive-display front panel interfaces
RoHS, CE, NRTL, SEMI S2, and SEMI F47 compliance