Features
High accuracy at low flow rates (< 1 sccm)
Excellent accuracy / repeatability (0.8% / 0.1% of measured value respectively)
Wide dynamic range (turndown ratio 1000:1)
Multiple gases and gas recognition
Digital and analog interfaces
Flexible mechanical connection options: down mount, VCR and VCO, Swagelok,
C-/W-Seal, etc.
Highly configurable
MTBF 169 years - no recalibration required
Applications
Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
Medical devices (e.g. ventilation, anesthesia)
Industrial process automation (e.g. coating, thermal processing)
Semiconductor industry (e.g. plasma etching processes, thin film deposition)