Thiết bị đo lưu lượng SFC5300 Sensirion

The SFC5300 mass flow controller measures and control mass flows with outstanding accuracy, long-term stability and repeatability. It boasts a compact size and an impressive dynamic measurement range. The body housing of the SFC5300 is metal. The  SFC5300 mass flow controller is available with downmount connections and two digital interfaces.

Ultra-fast gas flow control (settling time < 100 ms)
High accuracy at lowest flow rates (< 1sccm)
Excellent long-term stability and reliability
No aging effects
Wide dynamic range (turndown ratio 1000:1)
Multigas feature
Attractive price-performance-ratio thanks to CMOSens® Technology
Compact size

Applications

Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
Medical devices (e.g. ventilation, anesthesia)
Industrial process automation (e.g. coating, thermal processing) 
Semiconductor industry (e.g. plasma etching processes, thin film deposition)