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Resolution
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HV mode : 3.0 nm (30 kV) 15.0 nm (1.0 kV)
LV mode : 4.0 nm (30 kV with Backscattered electron image)
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Direct magnification
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x 5 to x 300,000
(reference image 128 mm x 96 mm)
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Displayed magnification
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x 14 to x 839,724
(reference image 358 mm x 269 mm)
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Electron gun
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Tungsten (W) filament
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Accelerating voltage
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0.3 kV to 30 kV
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Probe current
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1 pA to 1 μA
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LV pressure adjustment
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10 to 650 Pa
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Automatic functions
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Filament adjustment, Gun alignment,
Focus / Stigmator / Brightness / Contrast
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Maximum specimen size
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200 mm diameter, 90 mm height
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Specimen stage
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Large eucentric type
X: 125 mm Y: 100 mm Z: 80 mm Tilt: -10° to 90° Rotation: 360°
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Standard recipe
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Built-in (includes EDS conditions)
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Image modes
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Secondary electron image, REF image,
Compositional image, Topographic image, Stereo-microscopic image
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EDS functions
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Spectral analysis, Qualitative & Quantitative analysis,
Line analysis (horizontal line, specific direction line),
Elemental mapping, Probe tracking
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