High-speed analysis
Maximum probe current of more than 300 nA, allowing short acquisition time for EDS, WDS, and EBSD, while maintaining high resolution.
Energy signal differentiation
Incorporation of the TTL (through-the-lens) system in the standard configuration enables the use of energy filtering to selectively differentiate the electron energies.
High resolution
High resolution of 1.6 nm (at 1 kV), 1.2nm (at 30kV)
Wide area analysis
The LDF (large depth of field) mode enables applications like wide-area EBSD analysis, without the need to use stage scan (montage)
Thông số kỹ thuật
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Resolution
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1.6 nm (at accelerating voltage 1 kV),
1.2 nm (at accelerating voltage 30 kV)
3.0 nm (at accelerating voltage 15 kV, WD 10 mm,
probe current 5 nA / Analysis condition)
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Magnification
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×10 to ×1,000,000
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Imaging modes
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Secondary electron image, Backscattered electron image, Transmitted electrons (optional)
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Accelerating voltage
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0.01 to 30 kV
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Probe current
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1 pA to > 300 nA
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Electron gun
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In-lens Schottky field emission gun
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Motor control
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5-axis motor drive stage
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Stage movement
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X: 70 mm Y:50 mm, Z: 2.0 to 41 mm
Tilt: – 5 to 70°, Rotation: 360° endless
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Specimen exchange chamber
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Included in the standard configuration
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>>> JSM-7610F o Ha Noi