| Model | OF05ZAT | OF10ZAT | OF05ZZT | OF10ZZT | 
        
            | Flow rate range | Liquid viscosity0.3 – 0.8mPa・s | 0.085 – 0.85L/min | 0.7 – 5L/min | 0.085 – 0.85L/min | 0.7 – 5L/min | 
        
            | Liquid viscosity0.8 – 2.0mPa・s | 0.05 – 0.85L/min | 0.35 – 5L/min | 0.05 – 0.85L/min | 0.35 – 5L/min | 
        
            | Liquid viscosity2.0 – 5.0mPa・s | 0.017 – 0.85L/min | 0.17 – 5L/min | 0.017 – 0.85L/min | 0.17 – 5L/min | 
        
            | Liquid viscosity5.0 – 200mPa・s | 0.085 – 0.85L/min | 0.085 – 5L/min | 0.085 – 0.85L/min | 0.085 – 5L/min | 
        
            | Accuracy | ±2%RS(In the standard installation position) | 
        
            | Measurable liquid | Types of measurable liquid | Please decide based on the major materials exposed to the fluid, which are described below. | 
        
            | Major measurable liquid | Cold and hot water and heating, light and heavy oil | Mildly acidic and mildly alkaline liquid | 
        
            | Maximum operating pressure | 0.5MPa(When the liquid is at 20°C). | 
        
            | Pressure loss | 4 kPa or less | 10 kPa or less | 4 kPa or less | 10 kPa or less | 
        
            | Fluid temperature range | -10 to +70℃(No condensing) | 
        
            | Responsiveness | -10 to +70℃ 35~85%RH(No condensing) | 
        
            | Output signal | Voltage pulse output | Voltage pulse 3-wireLength of wire: Approx. 480 mmVoltage pulse duty ratio 2/8 < A/B < 8/2When voltage is applied at 12 VDC or less,High: 10 VDC or moreLow: 1 VDC or less  | 
        
            | Open collector output | Open collector pulse (Capacity: 6 mA DC or less)Length of 4 lead wire: Approx. 600 mm | 
        
            | Pulse constant | 0.46mL/P | 2.5mL/P | 0.46mL/P | 2.5mL/P | 
        
            | Maximum frequency | Approx. 30Hz | Approx. 33Hz | Approx. 30Hz | Approx. 33Hz | 
        
            | Minimum pulse width | Approx. 0.0065s | Approx. 0.006s | Approx. 0.0065s | Approx. 0.006s | 
        
            | Applied voltage range | 3 – 24VDC *1 | 
        
            | Power consumption | 0.2VA or less | 
        
            | Structure | Splash-proof structure (IP64 compatible) for indoor use | 
        
            | Connection | R1 / 4 | R1 / 2 | R1 / 4 | R1 / 2 | 
        
            | Mass | Approx. 100 g | Approx. 140 g | Approx. 100 g | Approx. 140 g | 
        
            | Major materials of the part exposed to liquid | Case | PPS | 
        
            | Rotor | PPS | 
        
            | O-ring | NBR | FKM | 
        
            | Shaft | SUS304 | SiC |