The Spin Dryer is a device in which water drops and moisture on a wafer can be dried using a mechanism of centrifugal force caused by spinning and an action of the suction of air current.
It is possible to dry even fine and thin pieces of wafer cleanly and safely by using Ohmiya Industries' balancing technique and air current control which maximize the efficiency of drying work pieces.
| Model |
Automatic Type
 |
Semi-auto or Manual Type
 |
| Revolution |
2-6 inch |
Max 1,000rpm |
| 8 inch |
| 12 inch |
Max 700rpm |
| Dimensions |
2-6 inch |
750mm × 1350mm × 1100mm |
750mm × 1430mm × 1100mm |
| 8 inch |
850mm × 1450mm × 1150mm |
850mm × 1530mm × 1150mm |
| 12 inch |
1050mm × 1700mm × 1170mm |
1050mm × 1780mm × 1170mm |
| Type |
Revolution downflow type spin dryer |
| Size of wafers for use |
2-12 inch |
| Power source |
AC200V [50/60Hz] |
| Axis sealing |
Forced vacuuming together with dust seal |
| Cradle |
Possible to mount 2 or 4 cradles |
| Speed setting |
1st-speed, 2nd-speed |
| Material |
SUS316L (EP) for both turn table and cradle |
| Exterior |
PVC |
| Safety feature |
Automatic stop upon unusual vibrations, overload operation prevention |
| Start-up time |
30 seconds or less(12in) / 25 seconds or less(∼8in) |