| Alignment degrees of freedom (DoF) |
up to 6 |
| 6 DoF linear alignment resolution |
< 0.1 µm
|
| Final sample linear alignment accuracy |
< 2 µm |
| 6 DoF tilt alignment resolution |
< 0.1 arcsec |
| Final sample tilt alignment accuracy |
< 2 arcmin |
| Sample Effective Focal Length |
1 to 12 mm (others on request) |
| Sample diameter |
2 to 30 mm (others on request) |
Field of View test chart
Field of View collimators
|
up to 70 °
up to 170 ° |
| Max. UPH (Units Per Hour) |
240* (single head, parallelization possible) |
| Camera interface |
MIPI, SPI, various analog, USB, FireWire, CamLink, GigE, custom (CAN, etc.) |
| Dispense technologies |
several options |
| LED UV cure |
several options |
| Post-curing |
optional (UV/thermal) |