| Air bearing |
Ø 300 mm |
Ø 600 mm |
Ø 800 mm |
| Centration measurement accuracy* |
0.1 µm |
0.1 µm |
0.1 µm |
| Alignment accuracy** |
Better than 2 µm |
Better than 2 µm |
Better than 2 µm |
| Alignment duration*** |
Approx. 15 s |
Approx. 15 s |
Approx. 15 s |
| Sample height |
1000 mm
(On request) |
1500 mm
(On request) |
1500 mm
(On request) |
As an option: center thickness and
air gap measurement
(UltraPrecision Version) |
1 µm
(0.15 µm) |
1 µm
(0.15 µm) |
1 µm
(0.15 µm) |
| Max sample weight |
450 kg |
900 kg |
1200 kg |
| Range of radii or EFL |
± 5-2000 mm (extendable) |
± 5-2000 mm (extendable) |
± 5-2000 mm (extendable) |
| Measuring head |
Top: C-ACM 500-57
Bottom: C-ACM 300-57 |
Top: C-ACM 500-57
Bottom: C-ACM 300-57 |
Top: C-ACM 500-57
Bottom: C-ACM 300-57 |
| Light source |
High Power Green LED, others on request |
High Power Green LED, others on request |
High Power Green LED, others on request |