| Measurement accuracy in VIS range 1) |
0.1 µm |
0.1 µm |
| Lens rotation |
Air bearing AB 100
(option: lens rotation device ) |
Air bearing AB 300
(option: lens rotation device) |
| Sample diameter |
0.5 – 225 mm
(0.5-125 mm or
0.5 to 200 mm lens Rotation device) |
0.5 – 400 mm |
| Max. sample weight |
Max. 20 kg |
300 kg |
| Linear stage |
Motorized and PC-controlled4) |
Motorized and PC-controlled |
Measurement head
for VIS spectral range 2) |
electronic ACM,
200 mm EFL |
electronic ACM,
200 mm EFL |
| Light source3) |
High power LED light source |
High power LED light source |
| MWIR or LWIR measurement head |
option |
option |