The AirSentry II family of ion mobility spectrometers for airborne molecular contamination (AMC) detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species. With parts-per-trillion (ppt) sensitivity, these point-of-use sensors provide fast response, increased detection selectivity and repeatable performance. Combining Air Sentry II sensors with a central software platform allows for easy data acquisition and analysis. The AirSentry II family of airborne molecular contamination sensors provide continuous actionable data, to enable efficient response to contamination sources and events.
Features
High-sensitivity detection of acids and bases (amines, ammonia and chlorides)
Versatile product configuration for point-of-use, multi-point and mobile airborne molecular contamination monitoring applications
Compact size allows placement in any location
Ethernet, RS-232, 4-20 mA outputs
Benefits
Continuous airoborne molecular contamination (AMC) monitoring of critical locations
Robust and reliable data acquisition, control and analysis
Long-term data stability
Lowest cost-per-test
Applications
Real-time corrosion monitoring within etch process locations
Real-time amine and ammonia monitoring within critical lithography systems
Quantification of chemical filter efficiency
Tracking and troubleshooting of airborne molecular contamination sources throughout cleanroom and in process tools
Analysis of airborne molecular contamination (AMC) within FOUP wafer storage modules