Máy phân tích mức độ ô nhiễm khí AirSentry® II PME

In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread airborne molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic airborne molecular contamination monitoring program.

Features

• Monitors up to 30 sample locations for airborne molecular contamination (AMC)
• Features AirSentry II ion mobility spectrometry (IMS) sensors—sensitive, reliable, repeatable
• Detection of low concentrations of acids, amines, ammonia and chlorides
• Calibrations traceable to the National Institute of Standards and Technology (NIST)
• Real-time graphical software
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Benefits

• Low cost-per-sample point
• Detects multiple airborne molecular contamination (AMC) compounds, as specified by the user
• Programmed monitoring to detect AMC events and trends
• Compact size
• Versatile configuration of testing locations
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