THE MODEL MF5100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 400 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS.
Features:
■ MINIMUN RANGE OF 5 SCCM & UP TO 400 SLM
■COMPACT SIZE
■ STANDARD SOFT-START FUNCTION
■MINIMUM LEAKAGE OF 1.013 × 10-10Pa·m3/s (He)