THE MODEL MF1100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 20 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS.
Features:
■ MINIMUN RANGE OF 5 SCCM & UP TO 20 SLM
■ COMPACT SIZE
■ STANDARD SOFT-START FUNCTION
■ MINIMUM LEAKAGE OF 1.013×10-9Pa·m3/s (He)